多片水平绷框盒

上下盖内绷环设计有效减少晶圆横向移动，同时确保不会压到晶圆边缘。锁扣安全系统和内环抗冲击空间设计，给晶圆运输过程中提供有效保护，优化产品设计的同时，又有效降低产品重量。设计符合制程设备自动接口。Upper lid and lower base match wafer flex frame design effectively reduces wafer lateral movement while ensuring that it does not press to wafer edges. Lock catch secure system and inner side impact resistant space design provide effective protection during wafer transportation. It can effectively reduce the overall weight while optimizing the product design. The design conforms to the automatic interface of process equipment.