扩晶环

内外圆对应R角搭配夹紧蓝膜，R角有效避免蓝膜划伤或破裂。内外环搭配后蓝膜被有效固定，利于拾取晶圆颗粒。材料具有良好的弹性和韧性，利于多次重复使用。The inner and outer ring correspond to R angle with clamping blue film, R angle effectively avoid blue film scratch or rupture. After the inner and outer rings are matched, the blue film is fixed effectively, which is conducive to picking up the wafer particles. The material has good elasticity and toughness, which is conducive to repeated use.